| 摘要 |
Disclosed is an element mapping method for a fluorescence spectrometer. The element mapping method for a fluorescence spectrometer according to the present invention is to analyze elements contained in a specimen after irradiating electron beams, which are emitted from an electron gun, to a specimen, and collecting fluorescent X-rays emitted from the specimen, and comprises: a step of setting measurement conditions for irradiating the electron beams to an interest area to be analyzed in the specimen and multiple detail areas in the specimen; a step of setting a frame and multiple pixels corresponding to the interest area and the detail areas respectively; a step of allocating pixel memories by a bit number identical to the bit number of an element table; a step of storing elements in order of detection when detecting the pixels by scanning the respective pixels depending on the measurement conditions; and a step of storing the elements, which are detected from the respective pixels, in the pixel memories depending on an element arrangement order designated in the element table, wherein the pixel memories is used to store the element table for setting the number and the kinds of the elements detected from the specimen and to store the information of the elements detected from the respective pixels. |
