| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for improving detection accuracy of an inspection apparatus.SOLUTION: An inspection apparatus 100 comprises: an irradiation part 101 irradiating a sample surface with a beam obtained by pulse oscillation from a laser source; a detection part 102 receiving light generated by the irradiation from the sample surface, and generating and outputting a detection signal; and a detection control part 104 generating a gate signal (G) for controlling the input/output of the detection part 102 and applying the gate signal to the detection part 102, in accordance with a pulse oscillation timing of the irradiation part 101. The detection part 102 receives light at a timing according to the gate signal (G), and generates and outputs the detection signal. |
