SUBSTRATE PROCESSING AND ALIGNMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate efficiently while separating the alignment and the actual processing, by taking out the position information about the position of processing region of a substrate in association with an alignment mark.SOLUTION: A substrate 5 is provided with alignment marks 6a, 6b fixed for the substrate 5, and can be manufactured efficiently by separating the alignment and the actual processing, when the position information about the position of processing region of the substrate 5 is taken out in association with the alignment marks 6a, 6b, before processing the substrate 5. The alignment can be carried out by remeasuring the positions of the alignment marks 6a, 6b only once when processing, and using the position information about the position of processing region thus stored.