| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control device capable of quickly reaching a flow rate to the target flow rate when starting to control a flow rate adjusting valve from the fully closed state so as to equalize a measured flow rate to a target flow rate and stably controlling the flow rate.SOLUTION: A fluid control device comprises: a flow rate adjusting valve 7 for adjusting a flow rate of a fluid flowing in a passage 51; flow rate measurement means 2 for measuring the flow rate of the fluid; and a control circuit 1 for outputting a drive signal to control the flow rate adjusting valve 7 so that the measured flow rate obtained by the flow rate measurement means 2 is equal to a given target flow rate. When the control circuit 1 starts to control the flow rate adjusting valve 7 from the fully closed state so as to equalize the measured flow rate to the target flow rate, an initial drive signal value is set using at least one of a fluid type, pressure and temperature as a parameter. |
