发明名称 |
CRYOPUMP, CRYOPANEL STRUCTURE, AND VACUUM EVACUATION METHOD |
摘要 |
A cryopump includes a nested array of cryopanels. A hydrogen molecule incident into a clearance in the nested array of cryopanels is reflected by a cryopanel. The reflected hydrogen molecule is adsorbed by another cryopanel. Each of the cryopanels may have an inverted frustum shape. |
申请公布号 |
US2014130523(A1) |
申请公布日期 |
2014.05.15 |
申请号 |
US201314079166 |
申请日期 |
2013.11.13 |
申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
TAKAHASHI KAKERU |
分类号 |
B01D8/00 |
主分类号 |
B01D8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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