| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow channel member having an enhanced heat exchange efficiency, a heat exchanger using the same, a semiconductor device, a semiconductor manufacturing device, and a method of manufacturing the flow channel member.SOLUTION: A flow channel member 101 comprises: a lid part 1; a side wall part 2 at least consisting of ceramic; and a bottom plate part 3, and has a flow channel 4 therein. A height h1 of a convex part 5a in a fluid flowing direction, formed on a flow channel 4 surface of the side wall part 2, is higher than a height h2 of a convex part 5b in a direction orthogonal to the fluid flowing direction. In addition, a heat exchanger, a semiconductor device, and a semiconductor manufacturing device can be obtained by using the flow channel member 101. In addition, in a method of manufacturing the flow channel member 101, because a through-hole that is to be the flow channel 4 is produced by a manufacturing method using a band saw or a wire, the flow channel member 101 in which the height h1 of the convex part 5a formed on the flow channel 4 surface of the side wall part 2 is higher than the height h2 of the convex part 5b, can be produced with ease.</p> |
