发明名称 LASER DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a laser device that reduces noise in burst light emission.SOLUTION: The laser device is configured to comprise: a first optical device that includes a first branch coupler element causing incident pulse light to be separated to first pulse light and second pulse light, temporally overlaps the separated first pulse light and the separated second pulse light and causes generation of light having a wavelength different from that of the first pulse light and that of the second pulse light; a second optical device that includes a second branch coupler element causing the incident pulse light to be separated into third pulse light and fourth pulse light, and is adjusted such that the third pulse light and the fourth pulse light are not temporally overlapped; and an electric pulse generation part that outputs an electric pulse for driving the first optical device and the second optical device.</p>
申请公布号 JP2014089474(A) 申请公布日期 2014.05.15
申请号 JP20140004596 申请日期 2014.01.14
申请人 NIKON CORP 发明人 OSHITA YOSHIAKI;TOKUHISA AKIRA
分类号 G02F1/37 主分类号 G02F1/37
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