METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element in which the characteristics can be improved by eliminating the influence of alignment error of an outline pattern and a groove pattern.SOLUTION: The outline and groove 13a of a vibration arm 12a are formed simultaneously by etching a substrate 41 using a first mask 43 covering a vibration part enlarged region 42 including the outline of a vibration arm 12a, and then further etching the substrate 41 by using a second mask 45 covering a region 44 becoming the vibration arm 12a excepting the groove 13a.