| 摘要 |
A filling method exhausts gas from inside a slit nozzle that applies coating liquid onto a substrate surface while filling the slit nozzle with the coating liquid. The slit nozzle includes a coating liquid supply opening, a coating liquid discharge outlet, a manifold that is connected to the supply opening and holds the coating liquid inside the slit nozzle, a liquid channel that is connected to the manifold and supplies the coating liquid to the discharge outlet of the slit nozzle, and a ventilation hole for exhausting gas from inside the manifold. The filling method includes: a discharge outlet closing process that closes the discharge outlet while the coating liquid is being fed from the supply opening into the slit nozzle; and a ventilation hole opening process that opens the ventilation hole. |
