发明名称 MULTILAYER POLISHING PAD
摘要 <p>The purpose of the present invention is to provide a multilayer polishing pad having a long service life, which is not susceptible to separation between a polishing layer and a cushion layer even in cases where the multilayer polishing pad is at high temperatures due to long-time polishing, thereby causing no defect in the cushion layer even after long-time polishing. A multilayer polishing pad of the present invention is obtained by laminating a polishing layer and a cushion layer with an adhesive member interposed therebetween. This multilayer polishing pad is characterized in that: the adhesive member is an adhesive layer that contains a polyester hot melt adhesive, or a double-sided tape that has the adhesive layer on both sides of a base; the adhesive layer or the double-sided tape has a non-adhesive region that occupies 1-40% of the surface area; and the polyester hot melt adhesive contains 2-10 parts by weight of an epoxy resin having two or more glycidyl groups in each molecule per 100 parts by weight of a polyester resin that serves as the base polymer.</p>
申请公布号 WO2014073344(A1) 申请公布日期 2014.05.15
申请号 WO2013JP78092 申请日期 2013.10.16
申请人 TOYO TIRE & RUBBER CO., LTD. 发明人 KAZUNO,ATSUSHI
分类号 B24B37/22;H01L21/304 主分类号 B24B37/22
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