| 摘要 |
<p>To provide: an electric heater capable of uniformly heating a plurality of sheet-shaped objects using simple heating control, simultaneously and under the same conditions; and a semiconductor production device comprising same. The electric heater comprises planar heat generating bodies (10) having formed therein a meandering current path, and a pair of quartz plates (20) sandwiching and holding therebetween these heat generating bodies (10). The electric heater heats sheet-shaped objects (W) such as semiconductor wafers. The entire heater comprises a plurality of segments (2) segmented so as to have boundaries (2x) in the radiation direction. Each segment (2) heats one sheet-shaped object (W). The heat generating bodies (10) are divided, in each segment (2), into at least disk-shaped inner circumference (A1), center (A2), and outer circumference (A3) sections. Heat generating bodies (10) belonging to each segment and adjacent in each of the inner circumference (A1), center (A2), and outer circumference (A3) sections are connected in series. The heat generating bodies (10) are individually heat-controlled in each of the inner circumference (A1), center (A2), and outer circumference (A3) sections.</p> |
