发明名称 Sensor element array and method of fabricating the same
摘要 A sensor element array and method of fabricating the same are provided. The sensor element array is disposed on a substrate and includes a first patterned conductive layer, a channel layer, a first insulation layer, a second patterned conductive layer, a second insulation layer, and a third patterned conductive layer. The first patterned conductive layer includes a sensing line, a first power line, a source/drain pattern and a branch pattern. The channel layer includes a first channel and a second channel. Margins of the first insulation layer and the second patterned conductive layer are substantially overlapped. The second patterned conductive layer includes a selecting line, a gate pattern, and a gate connecting pattern. The second insulation layer has a first connecting opening for exposing the gate connecting pattern. The third patterned conductive layer includes a sensing electrode electrically connected to the gate connecting pattern.
申请公布号 US8723278(B2) 申请公布日期 2014.05.13
申请号 US201213411623 申请日期 2012.03.04
申请人 LAI CHIH-MING;YEH YUNG-HUI;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LAI CHIH-MING;YEH YUNG-HUI
分类号 H01L29/84;G02F1/1333 主分类号 H01L29/84
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