发明名称 Interferometer and distance calculation method therefor
摘要 A method of calculating a geometrical distance of a test optical path on the basis of interfering a test beam and a reference beam includes an optical-path-length calculating step of calculating an optical path length of the test optical paths having different wavelengths by using the interfering beam having mutually different wavelengths, a refractive-index calculating step of calculating the refractive index of the test optical path on the basis of the optical path length of the test optical path calculated by the optical-path-length calculating step, a smoothing step of smoothing a plurality of refractive indices acquired by repeating the optical-path-length calculating step and the refractive-index calculating step to calculate a smoothed refractive index, and a geometrical distance calculating step of calculating the geometrical distance of the test optical path on the basis of the smoothed refractive index calculated by the smoothing step.
申请公布号 US8724114(B2) 申请公布日期 2014.05.13
申请号 US201113293780 申请日期 2011.11.10
申请人 KURAMOTO YOSHIYUKI;CANON KABUSHIKI KAISHA 发明人 KURAMOTO YOSHIYUKI
分类号 G01B11/02;G01B9/02 主分类号 G01B11/02
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