| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a monitoring device capable of monitoring the pupil intensity distribution, changing in various shapes by switching the illumination conditions, with high accuracy.SOLUTION: An monitoring device monitors the light intensity distribution formed on a specified surface in the optical path of an illumination optical system for illuminating an irradiated surface with the light from a light source. The monitoring device includes a beam splitter disposed closer to the light source side than the specified surface in the optical path and guiding a portion of the illumination light to a monitoring optical path, a photoelectric converter disposed at a position conjugate with the specified surface in the optical path, and a dimming member disposed removably for the optical path between the beam splitter and the photoelectric converter, and dimming the light directed toward the photoelectric converter.</p> |
