STAGE DEVICE, EXPOSURE DEVICE AND METHOD FOR PRODUCING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous in the enlargement and long-stroking of a stage device adopting an air bearing.SOLUTION: The stage device for moving a substrate comprises: a stage surface plate having a guiding member elongating along a first direction; a first stage movable along the guiding member; a second stage supported in a non-contact state by the first stage via an air bearing and movable on the first stage along the first direction; a stator supported by the stage surface plate; a first movable element fixed to the first stage so as to drive the first stage to the first direction by correlation with the stator; and a second movable element fixed to the second stage so as to drive the second stage to the first direction.