| 发明名称 |
TRANSPORT DEVICE AND SUBSTRATE PROCESSING APPARATUS |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To heighten substrate transport accuracy.SOLUTION: The transport device includes: a transport part that transports a band form sheet substrate; a detection part that detects part of the sheet substrate; and a drive part that moves the detection part in synchronization with a movement of the sheet substrate.</p> |
| 申请公布号 |
JP2014086449(A) |
申请公布日期 |
2014.05.12 |
| 申请号 |
JP20120231875 |
申请日期 |
2012.10.19 |
| 申请人 |
NIKON CORP |
发明人 |
HORI MASAKAZU ; SUZUKI TOMOYA |
| 分类号 |
H01L21/677;H01L51/50;H05B33/02;H05B33/10 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 地址 |
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