| 摘要 |
A high-frequency generator of non-thermal plasma of atmospheric pressure comprises flat metal low-potential and high-potential electrodes, a first dielectric plate located on one of the electrodes, the low end of which protrudes outside the limits of electrodes, channels for supplying gases to discharge gap between said electrodes, a substrate located opposite of the electrode end on a movable metallic table, which connected to ground and covered with the second dielectric plate. Moreover, the third dielectric plate is installed in a way that the first dielectric plate is located on the surface of high-potential electrode, the second plate is located on the surface of metallic working table, the third plate is located on the surface of low-potential electrode, the low end of first and third dielectric plates protrudes outside the limits of metallic electrodes, voltage from a power source to the high-potential electrode is supplied through a capacitor, to the low-potential electrode – by a capacitor voltage divider. |
