| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a satisfactory inverted pattern by inverting a pattern formed on a pattern formation layer.SOLUTION: A lift-off layer for inversion and a pattern formation layer are formed on a layer where an inverted pattern is to be formed, and the pattern formation layer is patterned to provide a concave pattern, and the concave pattern is transferred to the lift-off layer for inversion, and the lift-off layer for inversion in concave portions is removed to expose a surface of the layer where an inverted pattern is to be formed, and an inversion layer is formed on the lift-off layer for inversion and the exposed layer, and the lift-off layer for inversion is removed, thereby forming the inversion layer which has a convex pattern resulting from inversion of the concave pattern, on the exposed layer.</p> |
