LIGHT INTENSITY ADJUSTMENT DEVICE AND IRRADIATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide such a device as one that has not been reported yet in which a light spot diameter is uniform and light intensity can be controlled fine in the case that a light source such as ultraviolet ray light source emits light through electric discharge.SOLUTION: This invention provides a light intensity adjustment device for adjusting light intensity from a light source, the light intensity adjustment device comprises condensation means for concentrating light of the light source at a prescribed angle in respect to an optical axis, a bundle fiber whose incident ends are connected to emission ends of the condensation means and a diaphragm disposed just after the emission ends of the bundle fiber, and further this invention provides an irradiation device using the light intensity adjustment device.