| 摘要 |
The present invention relates to a nozzle shield for minimizing thermal strain, capable of preventing a nozzle from being clogged with particles attached to an edge of a bore hole due to thermal strain and minimizing the attachment of particles of a volatile material to an evaporation source. In a conventional nozzle, an opening of a nozzle is blocked by particles of a volatile material, so the volatile material is not evenly deposited on a glass. The conventional nozzle consumes unnecessary time to release a deposition chamber from a vacuum, remove particles from the nozzle, and return the deposition chamber back into a vacuum atmosphere, in order to remove the particles attached to the opening of the nozzle. This unnecessary time consumption reduces OLED production efficiency. To solve the problem, a bore hole formed in a nozzle shield has the diameter 3/2 (1.5) times that of the opening of the nozzle to prevent the nozzle from being blocked by the particles of the volatile material. |
