EVAPORATION MATERIAL FEEDING METHOD AND APPARATUS

摘要

A method for feeding an evaporation material for improving the stability of a crucible and an apparatus thereof are provided. The method for feeding an evaporation material for improving the stability of a crucible according to an embodiment of the present invention includes a source temperature maintenance step for maintaining the temperature of a source in a temperature range higher than the melting point of an evaporation material which is prepared for deposition of a substrate; and an evaporation material feeding step for feeding the evaporation material from an evaporation material storage unit which an evaporation material is stored to a source.