发明名称 DIFFRACTION GRATING AND OPTICAL DEVICE USING SAME
摘要 The diffraction grating is a transmission-type diffraction grating having a repeating structure of projection and recess on at least one surface of a substrate. A sub-structure of which the cross section is approximated as a triangle or a trapezoid is provided in the recess. The height H of the projection and the height h of the sub-structure are set such that the ratio of the height h of the sub-structure to the height H of the projection is in the range of from 0.05 to 0.45.
申请公布号 US2014126060(A1) 申请公布日期 2014.05.08
申请号 US201314070693 申请日期 2013.11.04
申请人 CANON KABUSHIKI KAISHA 发明人 SEKI TAKASHI
分类号 G02B5/18 主分类号 G02B5/18
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