| 摘要 |
<p>[Problem] To provide a work device having a position correction function that can solve the problem of positioning accuracy of a drive device. [Solution] A work device provided with a stage, a work head device, an image pick-up device, a drive device that causes the work head device and the stage to move relatively in the XYZ directions, and a control device that measures the displacement amount of the work head device, wherein a linear motion device is provided to which is attached the image pick-up device and the work head device and which can move back and forth between a first position and a second position in the X direction or the Y direction; the linear motion device is attached to the drive device so that the linear motion device can be moved back and forth by the drive device in the same direction as the back and forth motion of the linear motion device; and a control device calculates the positional displacement amount of the drive device on the basis of the difference between positional displacement amounts (X1, Y1) obtained by performing image processing on a first correction-use image captured by the image pick-up device when the linear motion device is at the first position, and positional displacement amounts (X2, Y2) obtained by performing image processing on a second correction-use image captured by the image pick-up device when the linear motion device is at the second position.</p> |
