| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method capable of recovering a resist liquid far more efficiently than in the prior art, of reducing the recovery cost, and of enhancing the recycling rate of the resist liquid.SOLUTION: Not only is a pail 10 provided as an exclusive vessel of a prescribed content volume used for feeding a resist liquid from a resist liquid supply facility to a resist liquid use facility but this pail 10 is also used as a resist liquid recovery vessel for recovering a used resist liquid 252 produced within the resist liquid use facility instantiated, for example, by a spin coater 250. The resist liquid use facility is a facility equipped with resist liquid coating apparatuses and executes, by the resist liquid coating apparatus unit, an operation of feeding the resist liquid into the resist liquid use facility and an operation of recovering the used resist liquid, whereas, upon the completion of the recovery, the resist liquid recovery vessel is returned to the resist liquid supply facility, and the used resist liquid is pumped and recycled from an inner vessel at the resist liquid supply facility.</p> |
