发明名称 MANUFACTURING METHOD OF DICING DIE-BONDING FILM
摘要 PROBLEM TO BE SOLVED: To provide a dicing die-bonding film obtained with a manufacturing method of the dicing die-bonding film capable of manufacturing the dicing die-bonding film which is excellent in adhesivity in a dicing process and in detachability in a pickup process, without design change even in industry scale.SOLUTION: A dicing die-bonding film includes a sticker layer and an adhesive layer which are sequentially laminated on a substrate. The adhesive layer includes an inorganic filler, irregularity is given on a pasting surface with the inorganic filler before pasting to the sticker layer, and an arithmetic average roughness Ra of the pasting surface is 0.015 to 1 μm. An arithmetic average roughness Ra of the sticker layer is ranging from 0.015 to 0.5 μm before pasting to the adhesive layer, a contact area of the pasting surface is ranging from 35 to 90% to a pasting area, and an adhesive strength of the sticker layer is ranging from 0.04 to 0.2 N/10 mm relative to the adhesive layer.
申请公布号 JP2014082498(A) 申请公布日期 2014.05.08
申请号 JP20130233336 申请日期 2013.11.11
申请人 NITTO DENKO CORP 发明人 AMANO YASUHIRO;MATSUMURA TAKESHI;INOUE KOICHI
分类号 H01L21/52;C09J7/02;C09J11/04;C09J201/00;H01L21/301;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/52
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