发明名称 INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an inspection device which, in one inspection device, copes with inspection of different kinds of bodies to be inspected and improves productivity in an inspection step of the body to be inspected by enhancing an operation rate of the inspection device.SOLUTION: An inspection device which inspects a boy to be inspected, includes: a plurality of probe unit mechanisms which inspect the body to be inspected; and an inspection position of the body to be inspected which corresponds to the plurality of probe unit mechanisms. The plurality of probe unit mechanisms are movable in the same direction line, and the inspection position is located on the direction line.
申请公布号 JP2014081234(A) 申请公布日期 2014.05.08
申请号 JP20120228005 申请日期 2012.10.15
申请人 MICRONICS JAPAN CO LTD 发明人 MIURA KAZUYOSHI;TAKAGI KAZUYA;NATSUBORI HIROSHI
分类号 G01R31/28;G02F1/13 主分类号 G01R31/28
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