IMAGING DEVICE, CONTROLLER AND CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To enable weighting on a scan line about an important part to be an inspection target of an object to be inspected.SOLUTION: An imaging device controls scanning means so as to overlap portions of adjacent scanning areas on each other among a plurality of scanning areas of measuring beams in an object to be inspected at a prescribed part, and acquires a tomographic image of the object to be inspected on the basis of a plurality of beams obtained by multiplexing a plurality of return beams from the object to be inspected irradiated with the plurality of measuring beams with a plurality of reference beams corresponding to the plurality of measuring beams.