WIRING FILM, TOUCH PANEL SENSOR, Cu ALLOY TARGET MATERIAL FOR SPUTTERING, AND MANUFACTURING METHOD OF WIRING FILM

摘要

PROBLEM TO BE SOLVED: To provide a wiring film having low resistance and excellent conductivity.SOLUTION: A wiring film comprises a Cu alloy film provided on a transparent conductive film that comprises a composite oxide including at least any of In, Ga, Sn, and Zn, and is formed on a substrate; and the Cu alloy film contains, in pure Cu having purity of 3 N or more, an element generating an oxide having lower standard generation free energy than that of an oxide of the pure Cu.