PLASMA GENERATOR INCLUDING MULTI ELECTRODES AND METHOD FOR GENERATING PLASMA USING THE SAME

摘要

Disclosed is a plasma generator. The plasma generator includes a main body for generating plasma through a pulse signal applied to a multi-electrode; a source power for applying pulse signals having mutually different frequencies to the multi-electrode; and a main control unit for adjusting a clock signal applied to the source power to synchronize the pulse signals applied to the multi-electrode so that the main control unit controls properties of the plasma by controlling the pulse signals to the source power.