Method of measuring using terahertz light

摘要

A measuring equipment utilizing terahertz pulse light, includes : a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.