发明名称 GROOVE PROCESSING TOOL AND GROOVE PROCESSING APPARATUS FOR A SUBSTRATE
摘要 <p>When a groove processing is performed by reciprocating a tool with respect to a substrate, a shaking angle of the tool become smaller and cutting dross are efficiently discharged so that processing quality is stabilized. A groove processing tool is held by a holder (17), and is reciprocated with the holder (17) on a substrate to form a groove. The groove processing tool includes a tool body (36) supported by the holder (17); and a blade point portion (37) formed to a front end portion of the tool body (36). The blade point portion (37) has a first blade (38a), a second blade (38b), and a relief portion (39). The first blade (38a) is formed to a front end portion of the tool body (36), and is formed to a front end portion of a sending portion. The second blade is formed to a returning portion. The relief portion (39) is formed between the first blade (38a) and the second blade (38b), and is formed to the tool body (36) to be concave.</p>
申请公布号 KR20140052820(A) 申请公布日期 2014.05.07
申请号 KR20130094595 申请日期 2013.08.09
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 YAMADA MITSURU;SOYAMA MASANOBU
分类号 B28D1/20;B23D13/00;B28D5/00;H01L21/304 主分类号 B28D1/20
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