发明名称 COATING, AND METHOD AND DEVICE FOR COATING
摘要 <p>The invention relates to a method and a device for applying a coating to a substrate, where a plasma jet of a low-temperature plasma is produced by conducting a working gas through an excitation zone. The plasma jet is directed at the substrate, and plate-shaped particles having an average thickness between 10 and 50,000 nanometers and a shape factor in a value range from 10 to 2000 are fed into the plasma jet. The plate-shaped particles are fed into the plasma jet by means of a carrier gas. The plasma jet is produced by exciting the working gas by means of an alternating voltage or a pulsed direct voltage.</p>
申请公布号 KR20140052982(A) 申请公布日期 2014.05.07
申请号 KR20137027300 申请日期 2012.03.15
申请人 REINHAUSEN PLASMA GMBH;ECKART GMBH 发明人 BISGES MICHAEL;WOLFRUM CHRISTIAN;GREB MARCO;RUPPRECHT MARKUS
分类号 C23C4/12;B05B7/22;C23C8/36;H05H1/26 主分类号 C23C4/12
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