发明名称 |
COATING, AND METHOD AND DEVICE FOR COATING |
摘要 |
<p>The invention relates to a method and a device for applying a coating to a substrate, where a plasma jet of a low-temperature plasma is produced by conducting a working gas through an excitation zone. The plasma jet is directed at the substrate, and plate-shaped particles having an average thickness between 10 and 50,000 nanometers and a shape factor in a value range from 10 to 2000 are fed into the plasma jet. The plate-shaped particles are fed into the plasma jet by means of a carrier gas. The plasma jet is produced by exciting the working gas by means of an alternating voltage or a pulsed direct voltage.</p> |
申请公布号 |
KR20140052982(A) |
申请公布日期 |
2014.05.07 |
申请号 |
KR20137027300 |
申请日期 |
2012.03.15 |
申请人 |
REINHAUSEN PLASMA GMBH;ECKART GMBH |
发明人 |
BISGES MICHAEL;WOLFRUM CHRISTIAN;GREB MARCO;RUPPRECHT MARKUS |
分类号 |
C23C4/12;B05B7/22;C23C8/36;H05H1/26 |
主分类号 |
C23C4/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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