发明名称
摘要 According to one embodiment, a semiconductor memory device includes a stacked body, a semiconductor pillar, a charge storage layer, a tunneling layer, a dividing trench and a first heating unit. The stacked body includes a plurality of first insulating films stacked alternately with a plurality of electrode films. The semiconductor pillar pierces the stacked body. The charge storage layer is provided between the electrode films and the semiconductor pillar. The tunneling layer is provided between the charge storage layer and the semiconductor pillar. The dividing trench is provided between the semiconductor pillars in one direction orthogonal to a stacking direction of the stacked body to divide the electrode films. The first heating unit is provided in an interior of the dividing trench.
申请公布号 JP5487170(B2) 申请公布日期 2014.05.07
申请号 JP20110191643 申请日期 2011.09.02
申请人 发明人
分类号 H01L27/115;H01L21/336;H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L27/115
代理机构 代理人
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