发明名称 |
CAPACITANCE TYPE PHYSICAL QUANTITY SENSOR AND ANGULAR VELOCITY SENSOR |
摘要 |
<p>The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5pF<Cin<20pF.</p> |
申请公布号 |
EP2474811(B1) |
申请公布日期 |
2014.05.07 |
申请号 |
EP20100811627 |
申请日期 |
2010.07.15 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
IWASAWA HIROSHI;MATSUMOTO MASAHIRO;NAKAMURA TOSHIAKI |
分类号 |
G01C19/56;G01D5/24;G01P15/125;G01P21/00 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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