发明名称 DYE ADSORPTION DEVICE AND DYE ADSORPTION METHOD
摘要 <p>The purpose of the present invention is to improve the throughput of a dye adsorption process in which a dye is adsorbed in a porous semiconductor layer on a substrate and to improve dye use efficiency. In a dye adsorption device of the present invention, a dye solution drop-coating unit 12 performs a first process (dye solution drop-coating process) on an unprocessed substrate G carried in the dye adsorption device 10, in which a dye solution is dropped and coated on a porous semiconductor layer on the substrate G. A solvent evaporating/removing unit 14 performs a second process (solvent removing process) in which a solvent is evaporated and removed from the dye solution coated on the semiconductor layer on the substrate G. A rinsing unit 16 performs a third process (rinsing process) in which unnecessary or extra dye attached to the surface of the semiconductor layer n the substrate G is rinsed and removed.</p>
申请公布号 EP2728663(A1) 申请公布日期 2014.05.07
申请号 EP20120805290 申请日期 2012.04.24
申请人 TOKYO ELECTRON LIMITED 发明人 FURUTANI, GORO
分类号 H01G9/20;H01L31/04;H01M14/00 主分类号 H01G9/20
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