发明名称 Photoacid generating monomer and precursor thereof
摘要 A monomer compound has the formula (I): where each R1, R2, and R3 is independently H, F, C1-10 alkyl, fluoro-substituted C1-10 alkyl, C1-10 cycloalkyl, or fluoro-substituted C1-10 cycloalkyl, provided that at least one of R1, R2, or R3 is F; n is an integer of from 1 to 10, A is a halogenated or non-halogenated C2-30 olefin-containing polymerizable group, and G+ is an organic or inorganic cation. The monomer is the reaction product of a sultone precursor and the oxyanion of a hydroxy-containing halogenated or non-halogenated C2-30 olefin-containing compound. A polymer includes the monomer of formula (I).
申请公布号 US8716518(B2) 申请公布日期 2014.05.06
申请号 US201113340088 申请日期 2011.12.29
申请人 COLEY SUZANNE M.;WILSON DAVID R.;TIMMERS FRANCIS J.;ROHM AND HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC 发明人 COLEY SUZANNE M.;WILSON DAVID R.;TIMMERS FRANCIS J.
分类号 C07C309/00 主分类号 C07C309/00
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