发明名称 |
Surface heating device for a substrate treatment device and substrate treatment device |
摘要 |
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane. |
申请公布号 |
US8718456(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US201013119121 |
申请日期 |
2010.08.23 |
申请人 |
HENTSCHEL MICHAEL;MEYER THOMAS;VON DER WAYBRINK HUBERTUS;KENNE MARCO;STANGE DANIEL;HECHT HANS-CHRISTIAN;VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
HENTSCHEL MICHAEL;MEYER THOMAS;VON DER WAYBRINK HUBERTUS;KENNE MARCO;STANGE DANIEL;HECHT HANS-CHRISTIAN |
分类号 |
F26B19/00 |
主分类号 |
F26B19/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|