发明名称 Catoptric imaging optical system with an arc-shaped object field
摘要 In certain aspects, imaging optical systems with a plurality of mirrors image an object field in an object plane into an image field in an image plane. In the light path between non-obscured mirrors, imaging rays pass through at least one multiple pass-through region between spaced-apart planes which are arranged parallel to the object plane and/or parallel to the image plane. The imaging optical systems have at least one pupil plane. The pupil plane is arranged outside the multiple pass-through region between the non-obscured mirrors. This can provide an imaging optical system which provides for an easier correction of image errors.
申请公布号 US8717538(B2) 申请公布日期 2014.05.06
申请号 US20100767574 申请日期 2010.04.26
申请人 MANN HANS-JUERGEN;CARL ZEISS SMT GMBH 发明人 MANN HANS-JUERGEN
分类号 G03B27/54 主分类号 G03B27/54
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