发明名称 |
Comprehensive analysis of queue times in microelectronic manufacturing |
摘要 |
A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups. |
申请公布号 |
US8718809(B2) |
申请公布日期 |
2014.05.06 |
申请号 |
US20100778457 |
申请日期 |
2010.05.12 |
申请人 |
BASEMAN ROBERT J.;NOWICKI TOMASZ J.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BASEMAN ROBERT J.;NOWICKI TOMASZ J. |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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