发明名称 Multi-beam optical displacement sensor
摘要 An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both converge in an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a light source, and a detection array. The electromagnetic beams may be converged one or more of: the interferometer and a convergence device. At least one reflective surface of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.
申请公布号 US8717580(B2) 申请公布日期 2014.05.06
申请号 US201213553298 申请日期 2012.07.19
申请人 CARR DUSTIN W.;BAKER HUGHES INCORPORATED 发明人 CARR DUSTIN W.
分类号 G01B11/14 主分类号 G01B11/14
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