| 摘要 |
A TCCT match circuit includes a power input circuit coupled with an RF supply unit; an internal coil input circuit coupled between the power input circuit and an input terminal of an internal coil, including an inductor and a capacitor coupled with the inductor in series, the inductor being connected to the power input circuit and the capacitor being connected with the input terminal of the internal coil, and having a first node defined between the power input circuit and the internal coil input circuit; an internal coil output circuit coupled between an output terminal of the internal coil and the ground and defining direct pass-through connection with the ground; an external coil input circuit coupled between the first node and an input terminal of an external coil; and an external coil output circuit coupled with an output terminal of the external coil and the ground surface. |
