| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid discharge head for efficiently filling up a recess to be formed in a flow channel formation member even when the flow channel formation member is formed by CVD using an inorganic material.SOLUTION: A method for manufacturing a liquid discharge head includes processes of: forming a mold which becomes a mold material of a liquid chamber on a substrate; forming a flow channel formation member by arranging an inorganic material on the substrate and the mold by a chemical vapor deposition method; forming, here, in the flow channel formation member, a recess in an area between two adjacent liquid chamber sidewalls and in which the mold is not arranged, and forming a photosensitive resin layer by arranging photosensitive resin on the flow channel formation member and in the recess; forming a filling material in the recess by grinding the photosensitive resin layer until the top face of an orifice plate is exposed; forming a discharge port in the flow channel formation member after grinding; and removing the mold after forming the discharge port. |
