| 摘要 |
PROBLEM TO BE SOLVED: To acquire accurate correction information without increasing manufacturing costs.SOLUTION: After trace formation processing for forming traces M on a trace sheet by probing with probes, first imaging processing for imaging a range A1 defined so as to include traces M formed by a reference probe and probes around the reference probe, imaging range designation request processing for displaying an image in the range A1 and designating a range A2 which includes the trace M formed by the reference probe and is narrower than the range A1, and second imaging processing for imaging the designated range A2 are executed in this order. Then, trace position specifying processing for analyzing image data in the range A2 to specify a position of the trace M formed by the reference probe and displacement state specifying processing for specifying the amount and direction of displacement of the specified position of the trace M from a reference probing position are executed to acquire the amount and the direction of displacement as correction information. |
