发明名称 FLUID CONTROL SYSTEM
摘要 At a time when control of a flow rate adjusting valve is initiated from a fully closed state in order to make a measured flow rate equal to a target flow rate, an initial value of a driving signal is set as a parameter by making use of at least one of the type, pressure, and temperature of a fluid.
申请公布号 US2014116538(A1) 申请公布日期 2014.05.01
申请号 US201314065042 申请日期 2013.10.28
申请人 HORIBA STEC, CO., LTD. 发明人 TANAKA YUKI;TAKAHASHI AKITO
分类号 G05D7/06 主分类号 G05D7/06
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