| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a light irradiation device and a light irradiation method which, while maintaining an organic substance removal effect comparable with the current level, can prevent the occurrence of a defective due to static electricity arising from a photoelectric effect, even when light is irradiated on an object-to-be-irradiated having a metal wiring or likely to cause a photoelectric effect.SOLUTION: Provided is an ultraviolet irradiation device 100 used to irradiate an ultraviolet ray on an object-to-be-irradiated W having a metal wiring m to remove an organic substance stuck to the object-to-be-irradiated W, the ultraviolet irradiation device comprising: a light source 1 for radiating light containing an ultraviolet ray equal to or shorter than a prescribed wavelength; and a metallic reflection mirror 3 for reflecting the light radiated from the light source 1 to the object-to-be-irradiated W. A clearance between the reflection mirror 3 and the object-to-be-irradiated is set to be shorter than a distance in which electrons caused to fly out from a reflection surface of the reflection mirror 3 by the ultraviolet ray can exist.</p> |
