发明名称 EPHEMERAL BONDING
摘要 Compositions containing an adhesive material and a release additive are suitable for temporarily bonding two surfaces, such as a wafer active side and a substrate. These compositions are useful in the manufacture of electronic devices where a component, such as an active wafer, is temporarily bonded to a substrate, followed by further processing of the active wafer.
申请公布号 US2014117504(A1) 申请公布日期 2014.05.01
申请号 US201314060185 申请日期 2013.10.22
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 OLIVER MARK S.;GALLAGHER MICHAEL K.;BRANTL KAREN R.
分类号 H01L21/78;H01L29/06 主分类号 H01L21/78
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