发明名称 SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device having high ESD tolerance. A first via (16) is used for electrically connecting a pad (22) to a drain of an NMOS transistor of an ESD protective circuit. The first vias (16) are formed under the pad (22) only on one side of a rectangular ring-shaped intermediate metal film (17) and on another side thereof opposed to the one side. In other words, all the first vias (16) for establishing an electrical connection to the drains are present substantially directly under the pad (22). Consequently, a surge current caused by ESD and applied to the pad (22) is more likely to flow uniformly among all the drains. Then, respective channels of the NMOS transistor of the ESD protective circuit are more likely to uniformly operate, and hence the ESD tolerance of the semiconductor device is increased.
申请公布号 US2014117451(A1) 申请公布日期 2014.05.01
申请号 US201314062019 申请日期 2013.10.24
申请人 SEIKO INSTRUMENTS INC. 发明人 KOYAMA TAKESHI;HIROSE YOSHITSUGU
分类号 H01L29/78 主分类号 H01L29/78
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