发明名称 DIFFUSION FURNACE
摘要 A diffusion furnace in the shape of polygonal-prism, including two end frame plates arranged in opposite basal planes of the diffusion furnace and a plurality of heating panels connected between the two end frame plates. Each heating panel includes at least one beam connected between the two end frame plates and a plurality of heating block interconnected in succession along and secured to the respective beam. Each heating block includes a block body, at least one heating element arranged on one side of the block body and amounting assembly mounted on the opposite side of the block body for securing the heating element. Thus, the disclosed diffusion furnace can be customized to satisfy different measurements requirement and can be easily decomposed for repair.
申请公布号 US2014117005(A1) 申请公布日期 2014.05.01
申请号 US201414148214 申请日期 2014.01.06
申请人 TANGTECK EQUIPMENT INC. 发明人 YU MING-HUI;KAO CHIA-JUNG;CHEN A-TZU;LIANG WANG-TSUNG;CHEN CHANG-FA
分类号 H01L21/67 主分类号 H01L21/67
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