发明名称 Forming agent for gate insulating film of thin film transistor
摘要 It is an object to provide a novel forming agent for a gate insulating film that not only provides high insulating properties for the gate insulating film but also takes account of the electric characteristics of a thin film transistor element. A forming agent for a gate insulating film of a thin film transistor characterized by comprising an oligomer compound or a polymer compound including a structural unit containing a pyrimidinetrione ring having a hydroxyalkyl-containing group as a substituent on a nitrogen atom; a gate insulating film formed by the forming agent; and a thin film transistor.
申请公布号 US8710491(B2) 申请公布日期 2014.04.29
申请号 US200913131807 申请日期 2009.11.26
申请人 MAEDA SHINICHI;KISHIOKA TAKAHIRO;NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 MAEDA SHINICHI;KISHIOKA TAKAHIRO
分类号 H01L29/08;H01L27/146;H01L31/062;H01L35/24;H01L51/00 主分类号 H01L29/08
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