发明名称 PORTABLE, ADAPTABLE EQUIPMENT HEALTH USER INTERFACE
摘要 Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.
申请公布号 US2014114611(A1) 申请公布日期 2014.04.24
申请号 US201314061725 申请日期 2013.10.23
申请人 APPLIED MATERIALS, INC. 发明人 MOYNE JAMES R.;ISKANDAR JIMMY;SCHULZE BRADLEY D.
分类号 G01M99/00 主分类号 G01M99/00
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